Main Article Content
In this study, we analyzed Zinc Oxide (ZnO) thin films deposited on silicon substrates using magnetron sputtering. These films have numerous applications in photovoltaic and optoelectronic devices due to their excellent physique properties. We used two structural characterization techniques: X-ray diffraction and scanning electron microscopy. We found that the ZnO films had good crystallinity and a columnar structure on the substrate surface, as indicated by the (002) orientation. These findings could potentially be useful for the development of ZnO-based devices such as solar cells and piezoelectric sensors. our results are consistent with those found by other researchers.
This work is licensed under a Creative Commons Attribution-ShareAlike 4.0 International License.
Attribution — You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
ShareAlike — If you remix, transform, or build upon the material, you must distribute your contributions under the same license as the original.
- No additional restrictions — You may not apply legal terms or technological measures that legally restrict others from doing anything the license permits.
J. A. Thornto. J. vac. Sci. Technol, Vol4 (6), p. 3059(1986).
D.Royer et E Dieulesaint. Ondes élastiques dans les solides, ed. Masson, Tomel,(1999) .
M. Pfister, M. C. Schaub, J. G. Watterson, M. Knecht, et P. G. Waser, « Radioactive labeling and location of specific thiol groups in myosin from fast, slow and cardiac muscles », Biochim. Biophys. Acta, vol. 410, no 1, p. 193 209, nov. 1975, doi: 10.1016/0005 2744(75)90220-x.
Guowei Mo, Yunxian Cui, Junwei Yin, Pengfei Gao. "Development and Characterization of ZnO Piezoelectric Thin Film Sensors on GH4169 Superalloy Steel Substrate by Magnetron Sputtering", Micromachines, 2022.
Wang, S. et al. (2011). High growth rate of ZnO thin films by magnetron sputtering at room temperature. Thin Solid Films, 519(23), 8232-8235.
Anjum, F. et al. (2016). Growth and characterization of ZnO thin films by magnetron sputtering technique for the application in organic solar cells. Applied Surface Science, 389, 205-211.
Sahu, R. K. et al. (2019). Tuning of electrical and optical properties of ZnO thin films prepared by rf magnetron sputtering. Journal of Materials Science: Materials in Electronics, 30(6), 5823-5832.
Zhang, W. et al. (2020). Low-temperature deposition of high-quality ZnO thin films by magnetron sputtering for flexible electronics. Journal of Materials Science, 55(12), 5202-5216.
Karakoti, A. et al. (2015). Influence of sputtering conditions on the properties of ZnO thin films deposited by reactive magnetron sputtering. Journal of Materials Science: Materials in Electronics, 26(10), 7907-7914.
Chen, S. et al. (2014). Growth of epitaxial ZnO thin films on Si(100) substrate by metalorganic chemical vapor deposition. Journal of Crystal Growth, 394, 89-94.
Nguyen, D. et al. (2017). Growth of high-quality ZnO thin films by low-pressure chemical vapor deposition using diethylzinc as a precursor. Journal of Materials Science, 52(15), 9014-9025.
Tan, S. et al. (2013). Conformal ZnO films by low-temperature atomic layer deposition for energy conversion applications. ACS Applied Materials & Interfaces, 5(17), 8411-8420.
Olsson, E. et al. (2016). Growth of ZnO thin films by spatial ALD using diethyl zinc and water as precursors. Journal of Vacuum Science & Technology A, 34(4), 041515.
Huang, Y. et al. (2017). ZnO thin films prepared by low-cost chemical bath deposition for flexible dye-sensitized solar cells. Journal of Materials Science: Materials in Electronics, 28(20), 15554-15561.
Stéphane Brochen, Propriétés électriques du ZnO monocristallin, Thèse de doctorat, université de Grenoble, 2012.
Jochen Langer. "Electric Field-Assisted Sintering and Hot Pressing of Semiconductive Zinc Oxide: A Comparative Study: Fast Sintering and Hot Pressing of Semiconductive Zinc Oxide", Journal of the American Ceramic Society, 2011)
R. Al Asmar, G. Ferblantier, J.L. Sauvajol, A. Giani, A. Khoury, A. Foucaran. "Fabrication and characterisation of high quality ZnO thin films by reactive electron beam evaporation technique", Microelectronics Journal, 2005.
J. E. J. MARTINI. "Coesite and stishovite in the Vredefort Dome, South Africa", Nature, 1978.
Yong Zeng, Zezhi Chen, Yaling Du, Qingyang Lyu, Ziyi Yang, Yang Liu, Zhiying Yan. "Microbiologically induced calcite precipitation technology for mineralizing lead and cadmium in landfill leachate", Journal of Environmental Management, 2021.
Ahmed Hassam. "Selection of alternative routings in real time: DMM and modified DMM rules", International Journal of Product Development, 2010.
Andrzej Daniluk. "Update 2.0 to rheed++: A complex computer model for dynamical one-beam calculations of RHEED intensity oscillations", SoftwareX, 2022.
Soon Wook Kim, Nguyen Tri Khoa, Jong Won Yun, Doan van Thuan, Eui Jung Kim, Sung Hong Hahn. "Hierarchical ZnO nanosheets/nanodisks hydrothermally grown on microrod backbones", Materials Chemistry and Physics, 2016
BENSMAINE. Souhila, Deposition of thin layers of zinc oxide with a tilted axis by magnetron sputtering and the production of SAW surface acoustic wave devices, PhD thesis 2008.
H. Mahdhi, Z. Ben Ayadi, N. Hadded, L. Gauffier, K. Djessas. "Study of gallium doping and substrate temperature effects on structural, electrical and optical properties of ZnO semiconductor layers", Journal of Materials Science: Materials in Electronics, 2015.